Homogenization and beam shaping with microlens arrays

作者: Irina Harder , Maik Lano , Norbert Lindlein , Johannes Schwider

DOI: 10.1117/12.549015

关键词:

摘要: … writing and reactive ion etching. To achieve the additional beam shaping qualities two micro … We used the defocused laser spot on a rotating scatterer as spatial partially coherent light …

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