Multisensor microchip which is used to measure gas flow, temperature and concentration in order to control combustion, production method thereof and use of same

摘要: The invention relates to the design and production of a microelectronic chip comprising an integrated assembly gas flow temperature sensors. inventive microchip can be used determine concentrations different gases in environment, as well rates temperatures thereof. aforementioned measurements monitor combustion household furnace adjust operation thereof order obtain safe, low-emission combustion.