Method of reducing contamination by providing a removable polymer protection film during microstructure processing
作者： Thomas Werner , Ralf Richter , Kai Frohberg , Frank Feustel
DOI:
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摘要: By providing a protective layer in an intermediate manufacturing stage, increased surface protection with respect to particle contamination and corrosion may be achieved. In some illustrative embodiments, the used during electrical test procedure, which respective contact portions are contacted through layer, thereby significantly reducing measurement process.
lens.org 参考文章(57)
Kazuhiro Takenaka, Platinum capacitor mos memory having lattice matched pzt ,(1991)
Makiko Kato, Yasukazu Iwasaki, Makoto Uchiyama, Method of producing device having minute structure ,(1995)
Andreja Kontic, Qualitative method for troubleshooting a dielectric tool ,(2002)
Minoru Ametani, Apparatus for peeling protective film off a thin article ,(1986)
Yasukazu Nihei, Method of manufacturing orientation film and method of manufacturing liquid discharge head ,(2008)
George L. Quinlan, Waterborne nitrocellulose compositions ,(1987)
Shinya Takyu, Tetsuya Kurosawa, Method of and mechanism for peeling adhesive tape bonded to segmented semiconductor wafer ,(2004)
Alan J. Riding, Leonard Pennisi, H. Wayne Jones, Method for producing thin dice from fragile materials ,(1996)
Oren Cohen, Erez Sali, Defect detection through image comparison using relative measures ,(2006)
Takashi Kumamoto, Multi-purpose planarizing/back-grind/pre-underfill arrangements for bumped wafers and dies ,(2001)