Scanning probe microscope with drift compensation
作者： Hanaul Noh , Sang-il Park
DOI:
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摘要: A scanning probe microscope compensates for relative drift between its upper structure that includes a and scanner scans the in straight line lower sample stage plane. light beam from is initially aligned with center of position sensitive photo detector (PSPD) disposed on at predetermined any subsequent misalignments PSPD are determined to be caused by compensated microscope.
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