Structure, mechanical and tribological behaviors of Ti/GLC multilayer films deposited by DC magnetron sputtering
作者： Heng Tian , Yongqiang Tang , Yanpin Wang , Lei Chen
DOI: 10.1016/J.DIAMOND.2019.107463
关键词:
摘要: Abstract The Ti/GLC multilayer films (MFs) with GLC monolayer thickness (MGLC) of 1.2–26.8 nm were deposited on Si and alloy substrates by magnetron sputtering. Microstructure features the MFs investigated Transmission Electron Microscopy (TEM), X-ray Diffraction (XRD), Raman spectrum. Results indicated that MGLC could tailor microstructure GLC-MFs. Simultaneously, Ti/GLC-MFs exhibited interface reaction due to mutually growth-promoting effect at small MGLC, fringes high-resolution TEM image proved formation TiC nanocrystalline layer Ti/GLC. Based content sp2-C dramatically increased, 1.2 nm considered transform into nanocomposite structure films. And then, Nano-Indentation Testing showed hardness GLC-MFs varied from 12.5 24.7 GPa, highest obtained an 1.2 nm. Finally, tribological properties using a Ball-On-Disk Tribometer under humid air. test result was found also lowest friction coefficient 0.06 wear resistance.
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