作者: H Nowakowska , Z Zakrzewski , M Moisan
DOI: 10.1088/0022-3727/23/7/007
关键词:
摘要: A channel-type model for RF and microwave discharges, operating under a local thermodynamic equilibrium (LTE) regime sustained by travelling waves, is proposed. Such discharges are, as rule, axially non-uniform. The channel presented includes this feature. From the analysis that follows, two functions of value heat flux potential at axis (SA) turn out to be necessary determine spatial structure discharge. These are L(SA), power dissipated per unit length plasma column, alpha (SA), wave attenuation coefficient. these, distribution S(r,z) can obtained. Under LTE conditions, sufficient distributions all parameters interest. As an example, nitrogen discharge surface calculated.