Modelling of atmospheric pressure, RF and microwave discharges sustained by travelling waves

作者: H Nowakowska , Z Zakrzewski , M Moisan

DOI: 10.1088/0022-3727/23/7/007

关键词:

摘要: A channel-type model for RF and microwave discharges, operating under a local thermodynamic equilibrium (LTE) regime sustained by travelling waves, is proposed. Such discharges are, as rule, axially non-uniform. The channel presented includes this feature. From the analysis that follows, two functions of value heat flux potential at axis (SA) turn out to be necessary determine spatial structure discharge. These are L(SA), power dissipated per unit length plasma column, alpha (SA), wave attenuation coefficient. these, distribution S(r,z) can obtained. Under LTE conditions, sufficient distributions all parameters interest. As an example, nitrogen discharge surface calculated.

参考文章(24)
M. P. Freeman, J. D. Chase, Energy‐Transfer Mechanism and Typical Operating Characteristics for the Thermal rf Plasma Generator Journal of Applied Physics. ,vol. 39, pp. 180- 193 ,(1968) , 10.1063/1.1655729
M. Moisan, R. Pantel, J. Hubert, Propagation of a Surface Wave Sustaining a Plasma Column at Atmospheric Pressure Contributions To Plasma Physics. ,vol. 30, pp. 293- 314 ,(1990) , 10.1002/CTPP.2150300213
M Capitelli, RS Devoto, Transport coefficients of high-temperature nitrogen Physics of Fluids. ,vol. 16, pp. 1835- 1841 ,(1973) , 10.1063/1.1694222
Denis Boudreau, Chantal Laverdure, Joseph Hubert, Nitrogen Determination in Argon by Surface-Wave-Induced Plasma Atomic Emission Spectrometry Applied Spectroscopy. ,vol. 43, pp. 456- 460 ,(1989) , 10.1366/0003702894202904
P.S. Moussounda, P. Ranson, J.M. Mermet, Spatially resolved spectroscopic diagnostics of an argon MIP produced by surface wave propagation (Surfatron) Spectrochimica Acta Part B: Atomic Spectroscopy. ,vol. 40, pp. 641- 651 ,(1985) , 10.1016/0584-8547(85)80111-7
J. T. Massey, S. M. Cannon, Constricted Discharges in the Rare Gases. I. Spectroscopic and Electrical Measurements Journal of Applied Physics. ,vol. 36, pp. 361- 372 ,(1965) , 10.1063/1.1713996