A simplified hydrokinetic model for a steady‐state microwave discharge sustained by traveling waves at atmospheric pressure conditions
作者： F. J. Gordillo‐Vázquez , J. Cotrino
DOI: 10.1063/1.360703
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摘要: The properties of a microwave‐induced argon plasma produced by traveling surface wave at atmospheric pressure are investigated theoretically. A hydrokinetic model is elaborated to obtain the nonequilibrium one‐dimensional profiles electron temperature Te (average energy), density ne, and first excited state population n4s, along axis steady‐state discharge. three‐level atomic structure assumed for atom. particle balance included through continuity equations ne n4s. These coupled with an energy equation electrons. effects different parameters on discharge investigated: tube radius, gas flow rate, resonant radiation‐escape factor, neutral temperature.
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