Principle of Ion Beam Processing and its Application to Fine and Precision Fabrication
作者： Iwao Miyamoto
DOI: 10.1016/B978-0-7506-9484-1.50015-4
关键词:
摘要: Concept and mechanisum of ion beam machining method, apparatus is reviewed. The characteristics such as angular energy dependence the sputtering yield, problems are discuss. Moreover, application to fine precision fabrication mechanical parts so on also discussed.
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