A tuned Langmuir probe for measurements in rf glow discharges

摘要: Measurements of charged‐particle concentrations and the electron energy distribution function (EEDF) have been made in Ar SF6 glow discharges using a tuned Langmuir probe technique. A simple passive circuit connected to when properly increases impedance between ground, thereby forcing follow instantaneous plasma potential. In this manner, rf‐induced distortion characteristic is mitigated. At 13.56 MHz collection detuned distorted by rf interference; ion unaffected. The EEDF highly non‐Maxwellian argon discharges, but quite Maxwellian discharges. mean with decreasing pressure increasing power independent measured functions charged particle are good agreement calculations.