Electrophoretic displays driven by all-oxide thin-film transistor backplanes fabricated using a solution process

作者: Satoshi Inoue , Tue Trong Phan , Tomoko Hori , Hiroaki Koyama , Tatsuya Shimoda

DOI: 10.1002/PSSA.201532082

关键词:

摘要: Precursor solutions and a solution process were developed for the fabrication of amorphous oxide thin-film transistors (TFTs). All layers TFTs comprised films prepared from precursor solutions. The gate lines, insulator, channel layer ruthenium oxide, lanthanum zirconium indium zinc films. polysilazane-based silicon dioxide film was used stopper layer. source-line drain electrode had double-layer structure comprising tin silsesquioxane-based passivation pixel electrodes, respectively. exhibited field effect mobility 2.68 cm2 V−1 s−1, sub-threshold swing 1.09 V/decade, threshold voltage 3.06 V, an on/off ratio 105. Active-matrix electrophoretic displays (EPDs) with resolution 101.6 ppi successfully fabricated using all-solution-processed TFTs. Bi-stable black/white images confirmed in these TFT-EPDs first time.

参考文章(23)
Huynh Thi Cam Tu, Satoshi Inoue, Phan Trong Tue, Takaaki Miyasako, Tatsuya Shimoda, Investigation of Polysilazane-Based $\hbox{SiO}_{2}$ Gate Insulator for Oxide Semiconductor Thin-Film Transistors IEEE Transactions on Electron Devices. ,vol. 60, pp. 1149- 1153 ,(2013) , 10.1109/TED.2013.2241440
Ichio Yudasaka, Hideki Tanaka, Masami Miyasaka, Satoshi Inoue, Tatsuya Shimoda, 27.2: Poly-Si Thin-Film Transistors Using Polysilazane-Based Spin-On Glass for All Dielectric Layers SID Symposium Digest of Technical Papers. ,vol. 35, pp. 964- 967 ,(2004) , 10.1889/1.1825810
Jinwang Li, Huynh Thi Cam Tu, Satoshi Inoue, Eisuke Tokumitsu, Tatsuya Shimoda, Phan Trong Tue, Takaaki Miyasako, High-Performance Solution-Processed ZrInZnO Thin-Film Transistors IEEE Transactions on Electron Devices. ,vol. 60, pp. 320- 326 ,(2013) , 10.1109/TED.2012.2227483
James F. Tressler, Koji Watanabe, Masahiro Tanaka Sony, Synthesis of Ruthenium Dioxide Thin Films by a Solution Chemistry Technique Journal of the American Ceramic Society. ,vol. 79, pp. 525- 529 ,(1996) , 10.1111/J.1151-2916.1996.TB08159.X
Myung-Gil Kim, Hyun Sung Kim, Young-Geun Ha, Jiaqing He, Mercouri G. Kanatzidis, Antonio Facchetti, Tobin J. Marks, High-performance solution-processed amorphous zinc-indium-tin oxide thin-film transistors. Journal of the American Chemical Society. ,vol. 132, pp. 10352- 10364 ,(2010) , 10.1021/JA100615R
S. Bhaskar, P. S. Dobal, S. B. Majumder, R. S. Katiyar, X-ray photoelectron spectroscopy and micro-Raman analysis of conductive RuO2 thin films Journal of Applied Physics. ,vol. 89, pp. 2987- 2992 ,(2001) , 10.1063/1.1337588
Robert M. Pasquarelli, David S. Ginley, Ryan O'Hayre, Solution processing of transparent conductors: from flask to film Chemical Society Reviews. ,vol. 40, pp. 5406- 5441 ,(2011) , 10.1039/C1CS15065K
F. Shan, A. Liu, G. Liu, Y. Meng, E. Fortunato, R. Martins, Low-Voltage High-Stability InZnO Thin-Film Transistor Using Ultra-Thin Solution-Processed ZrO $_{x}$ Dielectric IEEE\/OSA Journal of Display Technology. ,vol. 11, pp. 541- 546 ,(2015) , 10.1109/JDT.2014.2366933
Kenji Nomura, Hiromichi Ohta, Akihiro Takagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono, Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors Nature. ,vol. 432, pp. 488- 492 ,(2004) , 10.1038/NATURE03090
Tae Eun Hong, Ki-Yeung Mun, Sang-Kyung Choi, Ji-Yoon Park, Soo-Hyun Kim, Taehoon Cheon, Woo Kyoung Kim, Byoung-Yong Lim, Sunjung Kim, Atomic layer deposition of Ru thin film using N2/H2 plasma as a reactant Thin Solid Films. ,vol. 520, pp. 6100- 6105 ,(2012) , 10.1016/J.TSF.2012.05.069