作者: Satoshi Inoue , Tue Trong Phan , Tomoko Hori , Hiroaki Koyama , Tatsuya Shimoda
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摘要: Precursor solutions and a solution process were developed for the fabrication of amorphous oxide thin-film transistors (TFTs). All layers TFTs comprised films prepared from precursor solutions. The gate lines, insulator, channel layer ruthenium oxide, lanthanum zirconium indium zinc films. polysilazane-based silicon dioxide film was used stopper layer. source-line drain electrode had double-layer structure comprising tin silsesquioxane-based passivation pixel electrodes, respectively. exhibited field effect mobility 2.68 cm2 V−1 s−1, sub-threshold swing 1.09 V/decade, threshold voltage 3.06 V, an on/off ratio 105. Active-matrix electrophoretic displays (EPDs) with resolution 101.6 ppi successfully fabricated using all-solution-processed TFTs. Bi-stable black/white images confirmed in these TFT-EPDs first time.