Conductor with a plurality of vertical extensions for a 3D device
作者： Yen-Hao Shih , Hang-Ting Lue
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摘要: Conductors in a 3D circuit that include horizontal lines with plurality of vertical extensions high aspect ratio trenches can be formed using two-step etching procedure. The procedure comprise providing substrate having spaced-apart stacks; forming pattern pillars body conductor material between and the over stacks, connecting pillars. deposited stacks. A first etch process used to form second lines. conductors as word or bit memory.
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