Apparatus for magnetic field pulsed laser deposition of thin films
作者： Gouri Radhakrishnan
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摘要: The present invention relies upon a free space magnetic field in pulsed laser deposition (PLD) chamber for forming high quality thin films made from diverted ions plume evaporated an ablated target illuminated by beam. exerts qv X B Lorentz force the that is orthogonal to and their direction of travel plume, curves toward substrate, while neutral particulates continue pass substrate so large are not deposited on substrate. A shield prevents species direct line sight between only charged curved magnet permanent used separate species. deflects away primary ion method provides particulate-free having improved crystallinity, uniformity adhesion.
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