作者: Ikushima Kazumasa
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摘要: [Problem] To provide a work apparatus and method whereby can be obtained that is free of variations among plurality heads having machine differences. [Solution] A uses the apparatus, provided with n (where natural number equal to 2 or greater) for performing same work, stage retaining object, first-direction drive device moving relative each other, second-direction third-direction amount measurement measuring head, control device, being capable independently in first direction, main second direction simultaneously secondary n-1 direction.