Method, apparatus and program for filling liquid material

作者: Kazumasa Ikushima

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摘要: Provided are a method, an apparatus and computer program for filling liquid material, which do not require complicated parameter calculation affect the moving speed of discharge unit. In method gap between substrate work placed thereon with material discharged from unit by utilizing capillary action, is characterized in forming application pattern made up region non-application along outer periphery work, correcting amount extending contracting region. The carrying out also provided.

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