New leak assembly based on fluidic nanochannels

作者: Aiqing Zhu , Yongheng Zhao , Xudi Wang , Yu Wang , Wei Wei

DOI: 10.1116/1.4960646

关键词:

摘要: … In conclusion, a new leak assembly composed of fluidic nanochannels was proposed, … of the fluidic nanochannels. To avoid the influence of Torr-Seal outgassing, new installation …

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