作者: Dong Dong , Wei Wei , Dan Yang , Xudi Wang
DOI: 10.1016/J.VACUUM.2015.08.014
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摘要: Abstract This paper presents a new permeation measurement facility based on the difference method, which is shown to be capable of measuring gas fluxes through different polymeric membranes. In order correct for background pressure increase in chamber, reference chamber has been adapted and connected it. The flux was examined by between chambers. Pure helium performed polydimethylsiloxane (PDMS) polyethylene terephthalate (PET) membranes using this method. uncertainty permeability evaluated. results show that introduction can mitigate influence residual chamber. method allows simplified visualized fluxes.