Motion Characterizations of Lateral Micromachined Sensor Based on Stroboscopic Measurements

摘要: In this paper, we illustrate the capabilities of Planar Motion Analyzer (PMA) with a study dynamic behavior micromachined structure. Dynamic characterizations and measurement settings are also demonstrated. The optical system uses light-emitting diode (LED) based vibration technique for imaging, then measuring lateral resonant frequency sensor displacements, as well. PMA analyzes in-plane vibrations MEMS device under clear microscope. Its working principle is on stroboscopic principle. Based principle, characterization results in both time domains can be accurately generated analyzed. Our example tunneling-based micro-resonator, which was fabricated using Backside Released SOI process. tunneling observed by controlling motion tip towards opposing electrode typical gap 10 Aring. This very small easily achieved Bode shifting LED-strobe flashes at increment phase angle over whole sensor. other words, smaller motions will achieved, when number shots per period larger. For our measurement, shift 0.5deg 720 period. moving proof mass suspended folded springs, its protrudes to an means electrostatic forces. current has been exponentially increasing, decreasing. However, further large actually contacting current, mechanical contact happens between electrode. ~5 kHz obtained from