Bulk micromachined tunneling tips integrated with positioning actuators
作者： M. Mita , H. Kawara , H. Toshiyoshi , J. Endo , H. Fujita
DOI: 10.1109/JMEMS.2004.838997
关键词:
摘要: We have successfully developed an integrated micromechanical system for controlling tunneling current. A pair of nanoscale tips been with a silicon micromachined electrostatic actuator high-aspect ratio. The tip sharpness has observed to be as sharp commercial by scanning over surface carbon graphite atom scale. also succeeded observe the current in air and vacuum condition (in TEM).
sci-hub.se 参考文章(14)
M. Mita, H. Toshiyoshi, K. Kakushima, G. Hashiguchi, D. Kobayashi, J. Endo, Y. Wada, H. Fujita, Characterization of bulk micromachined tunneling tip integrated with positioning actuator international conference on micro electro mechanical systems. pp. 352- 355 ,(2002) , 10.1109/MEMSYS.2002.984275
H. Toshiyoshi, M. Mita, M. Goto, G. Hashiguchi, P. Fujita, D. Kobayashi, J. Endo, Y. Wada, Micromechanical tunneling probes and actuators on a silicon chip international microprocesses and nanotechnology conference. pp. 180- 181 ,(1999) , 10.1109/IMNC.1999.797536
M. Mita, H. Kawara, H. Toshiyoshi, M. Ataka, H. Fujita, An electrostatic 2-dimensional micro-gripper for nano structure international conference on solid state sensors actuators and microsystems. ,vol. 1, pp. 272- 275 ,(2003) , 10.1109/SENSOR.2003.1215305
Dai Kobayashi, Hiroyuki Fujita, Design, Fabrication and Operation of a Micromachined Tunneling Control Unit Ieej Transactions on Sensors and Micromachines. ,vol. 116, pp. 339- 344 ,(1996) , 10.1541/IEEJSMAS.116.339
M. I. Lutwyche, Y. Wada, Observation of a vacuum tunnel gap in a transmission electron microscope using a micromechanical tunneling microscope Applied Physics Letters. ,vol. 66, pp. 2807- 2809 ,(1995) , 10.1063/1.113482
R.L. Kubena, G.M. Atkinson, W.P. Robinson, F.P. Stratton, A new miniaturized surface micromachined tunneling accelerometer IEEE Electron Device Letters. ,vol. 17, pp. 306- 308 ,(1996) , 10.1109/55.496466
Gen Hashiguchi, Hidenori Mimura, Fabrication of Silicon Quantum Wires Using Separation by Implanted Oxygen Wafer Japanese Journal of Applied Physics. ,vol. 33, pp. L1649- L1650 ,(1994) , 10.1143/JJAP.33.L1649
R. L. Kubena, A new high‐performance surface‐micromachined tunneling accelerometer fabricated using nanolithography Journal of Vacuum Science & Technology B. ,vol. 14, pp. 4029- 4033 ,(1996) , 10.1116/1.588637
T. W. Kenny, S. B. Waltman, J. K. Reynolds, W. J. Kaiser, Micromachined silicon tunnel sensor for motion detection Applied Physics Letters. ,vol. 58, pp. 100- 102 ,(1991) , 10.1063/1.104432
D. Kobayashi, T. Hirano, T. Furuhata, H. Fujita, An integrated lateral tunneling unit international conference on micro electro mechanical systems. pp. 214- 219 ,(1992) , 10.1109/MEMSYS.1992.187720