An electrostatic 2-dimensional micro-gripper for nano structure
作者： M. Mita , H. Kawara , H. Toshiyoshi , M. Ataka , H. Fujita
DOI: 10.1109/SENSOR.2003.1215305
关键词:
摘要: We have successfully microfabricated an electrostatically controlled micro gripper for handling nano particles. The has sharp twin tips that can be independently in the XY-plane, and visually confirmed manipulation of a gold particle trapped between probes.
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sci-hub.se 参考文章(3)
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