Experimental verification of the shape of the excitation depth distribution function for AES

摘要: In the common formalism of AES, it is assumed that in-depth distribution ionizations uniform. There are experimental indications this assumption may not be true for certain primary electron energies and solids. The term “excitation depth function” (EXDDF) has been introduced to describe at used in AES. This function conceptually equivalent Phi-rho-z microprobe analysis (EPMA). are, however, difficulties determine particular below ∼ 10 keV. present paper, we investigate possibility determining shape EXDDF from background inelastically scattered electrons on low energy side Auger features spectra. experimentally determined EXDDFs compared with Monte Carlo simulations trajectories It found technique useful determination function.