A universal algorithm for calculating the backscattering factor in Auger-electron spectroscopy

摘要: We describe a universal Monte Carlo algorithm that can be used for the efficient calculation of backscattering factors (BFs) quantitative Auger-electron spectroscopy (AES). This makes use continuous slowing-down approximation and electron stopping power instead simulation individual inelastic-scattering events. approach is attractive because it applied to any material with an empirical formula power, available data differential elastic-scattering cross sections, inner-shell ionization sections. report BFs Si KL23L23, Cu L3M45M45, Ag M5N45N45, Au M5N67N67 Auger transitions in corresponding elemental solids. These were calculated normal incidence primary beam, energies from near threshold relevant core levels 20 keV, emission angles 10°, 60°, 80°. found satisfactory agreement between these values obtained more accurate which events simulated. Percentage deviations two algorithms <2% Au, <5% Ag, <7% Cu, <10% likely practical AES. arise mainly our powers rather than reliable experimental optical data.