The backscattering factor for systems with a buried layer

摘要: The accuracy of quantitative Auger-electron spectroscopy analysis can be further improved, for example, by a proper description the matrix effects. backscattering effect in Auger spectrometry uniform medium has attracted significant interest literature. Studies on factor (BF) layered sample are unique, and case BF buried layer certain material is still untouched. We develop Monte Carlo model calculation system. used continuous slowing down approximation electron stopping power instead simulation individual inelastic scattering performed calculations selected cases Au Ni M5N67N67 transition Si KL23L23 versus depth sorting out thickness primary beam 5?keV energy at normal incidence. reveal that may differ from even about 60%. This phenomenon explained terms excitation distribution function. results obtained very useful when variation expected to most important effect, as happen system investigated technique known profiling.