Backscattering yield paradox for samples with perpendicular layers

摘要: Special samples with multilayers which are perpendicular to the surface presently proposed for testing lateral resolution of imaging. Despite considerable progress in theoretical description electron transport phenomena a solid, there is need depiction this kind. An accurate can be gained by Monte Carlo (MC) simulations trajectories. We investigated relation backscattering yield (BY) versus beam position selected systems layers filled high, medium and low atomic numbers: Au|Cu|Au, Cu|Au|Cu, Au|Si|Au Si|Au|Si, 10 5 keV primary beam. In MC BY particular importance since it offers good test scattering model. used so-called continuous slowing down approximation (CSDA), account inelastic processes. found paradox calculated relations: may exhibit unexpected values some positions, greater or smaller than those corresponding elements comprising layered sample. The origin effect discussed work.