Self-actuating RF MEMS device by RF power actuation
作者： Xavier Rottenberg , Stefan Pauwen
DOI:
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摘要: Systems and methods for controlling a micro electromechanical device using power actuation are disclosed. The disclosed systems comprise at least one electrostatically actuatable an device. comprises first conductor second having moveable portion which in use may be attracted by the as result of predetermined power. high frequency signal generator generating part means with higher than mechanical resonance
lens.org 参考文章(4)
Tsung-Kuan Allen Chou, Mechanism to prevent self-actuation in a microelectromechanical switch ,(2004)
Marco Francesco Aimi, Kanakasabapathi Subramanian, William James Premerlani, Christopher Fred Keimel, Xuefeng Wang, MEMS switch with improved standoff voltage control ,(2007)
Xavier Rottenberg, Hendrikus Tilmans, Method for designing a micro electromechanical device with reduced self-actuation ,(2005)
Hector J. De Los Santos, Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods ,(2003)