Mechanism to prevent self-actuation in a microelectromechanical switch
作者： Tsung-Kuan Allen Chou
DOI:
关键词: Resistor 、 Electrode 、 Microelectromechanical systems 、 Electrical engineering 、 Substrate (printing) 、 Mechanism (engineering) 、 Materials science
摘要: According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS includes substrate, bottom electrode mounted on the top electrode, an actuation substrate and resistor coupled electrode. prevents self-actuation at whenever open.
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