Micro-electromechanical system (MEMS) trampoline switch/varactor
作者： Tsung-Kuan Allen Chou
DOI:
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摘要: A micro-electromechanical device includes an actuation electrode and a suspended electrode. The is disposed on substrate. proximate to the support members plate member. Each of clamped at either end substrate via anchors member supported by members. are flexible in response voltage that applied between allow electrostatically pull towards signal line coupled
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