Cleaning systems and methods for semiconductor substrate storage articles

摘要: Provided are methods and systems for cleaning various semiconductor substrate storage articles, in particular, FOUP doors. The doors other similar articles often have openings that may get contaminated with liquids if not covered. described system includes contact points engaging the article covering these openings. be also used supporting pressurizing a gas. gas supplied through one or more points. It prevents from getting into even completely sealed. pressurization maintained entire wet portion of process. rotated within while and/or gases dispensed set spraying nozzles. Spraying nozzles move to enhance article.