Device and method for cleaning and drying wafer cassettes
作者： Wu Lianghui
DOI:
关键词:
摘要: The invention discloses a device for cleaning and drying wafer cassettes. the cassettes comprises cavity, support frame used supporting plurality of cassettes, liquid spray pipe externally connected with source, discharging pipeline an air exhausting pipeline, wherein are respectively bottom arranged in cavity. further dry is method source provided, can not only drive away ultrapure water vapor but also suck all condensed comprehensive sufficient achieved.
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