作者: V.G. Badami , S.R. Patterson
DOI: 10.1016/S0141-6359(99)00026-4
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摘要: This paper presents a method for the measurement of nonlinearity in heterodyne interferometry which utilizes frequency spectrum output photodetector direct magnitudes first and second harmonic nonlinearities. The underlying theory experimental technique are discussed. Results showing application this determination influence azimuthal alignments polarization beamsplitter, analyzer retroreflector presented. applicability to situ optimization an interferometer system is demonstrated. It shown that using can be optimized reduce first-harmonic below 0.5 nm p-p 2 p-p. contrasted with other methods advantages conferred by elimination external reference phase measuring electronics highlighted.