Adaptive Nonlinearity Compensation of Heterodyne Laser Interferometer
作者： Minsuk Hong , Jaewook Jeon , Kiheon Park , Kwanho You
DOI: 10.1007/11893004_71
关键词:
摘要: With its outstanding ultra-precise resolution, the heterodyne laser interferometer systems are commonly used in semiconductor manufacturing industry. However, periodical nonlinearity error caused from frequency-mixed cross talks limits accuracy nanometer scale. In this paper to improve of system, we propose an adaptive compensation algorithm using RLS (recursive least square) method. As a reference signal, capacitance displacement sensor mounted on linear piezo-electric transducer gives feedback information how transform elliptical phase into circular one.
springer.com
sci-hub.st 参考文章(9)
Boris T Poljak, Introduction to optimization Optimization Software, Publications Division. ,(1987)
Ching-shen Su, Chien-ming Wu, Nonlinearity in measurements of length by optical interferometry Measurement Science and Technology. ,vol. 7, pp. 62- 68 ,(1996) , 10.1088/0957-0233/7/1/009
TaeBong Eom, TaeYoung Choi, KeonHee Lee, HyunSeung Choi, SunKyu Lee, A simple method for the compensation of the nonlinearity in the heterodyne interferometer Measurement Science and Technology. ,vol. 13, pp. 222- 225 ,(2002) , 10.1088/0957-0233/13/2/313
V.G. Badami, S.R. Patterson, A frequency domain method for the measurement of nonlinearity in heterodyne interferometry Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology. ,vol. 24, pp. 41- 49 ,(2000) , 10.1016/S0141-6359(99)00026-4
J.M. De Freitas, M.A. Player, Polarization Effects in Heterodyne Interferometry Journal of Modern Optics. ,vol. 42, pp. 1875- 1899 ,(1995) , 10.1080/09500349514551641
Hsien-Chi Yeh, Wei-Tou Ni, Sheau-shi Pan, Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry Control Engineering Practice. ,vol. 13, pp. 559- 566 ,(2005) , 10.1016/J.CONENGPRAC.2004.04.019
Tong-Jin Park, Hyeun-Seok Choi, Chang-Soo Han, Yong-Woo Lee, Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter Optics and Laser Technology. ,vol. 37, pp. 229- 234 ,(2005) , 10.1016/J.OPTLASTEC.2004.03.009
John Lawall, Ernest Kessler, Michelson Interferometry With 10 PM Accuracy Review of Scientific Instruments. ,vol. 71, pp. 2669- 2676 ,(2000) , 10.1063/1.1150715
Edwin Kah Pin Chong, Stanislaw H Żak, An introduction to optimization Published in <b>2001</b> in New York (N.Y.) by Wiley. ,(2001)