Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry
作者： Hsien-Chi Yeh , Wei-Tou Ni , Sheau-shi Pan
DOI: 10.1016/J.CONENGPRAC.2004.04.019
关键词: Optics 、 Positioning system 、 Metrology 、 Interferometry 、 Scanning tunneling microscope 、 Laser 、 Physics 、 Control system 、 Digital control 、 Scanning probe microscopy
摘要: To enhance the accuracy of nanopositioning and metrological capability scanning probe microscopy, we construct a two-dimensional interferometric system consisting rectilinear flexure stage, calibrated laser interferometer, digital feedback control system. We implement correlation matrix, determined by piezoelectric constant crosstalk between two axes, into closed-loop algorithm to compensate nonlinearity PZT-driven stage. In tests on nanopositioning, 1-nm-step motion tracking along 1-nm-radius circular target path are accomplished verify short-term repeatability subnanometer-level precision. Additionally, tunneling microscope equipped with is built up demonstrate functions microscopy.
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