Film Deposition Using Precursors Containing Amidoimine Ligands
作者： Jeffrey W. Anthis , Shaun Garrett , David Thompson , Ravi Kanjolia
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摘要: Methods are provided for deposition of films comprising manganese on surfaces using metal coordination complexes an amidoimino-based ligand. Certain methods comprise exposing a substrate surface to precursor, and the co-reagent.
lens.org 参考文章(2)
Thomas J. Knisley, Charles H. Winter, Thermally stable volatile precursors ,(2011)