Thermally stable volatile precursors
作者： Thomas J. Knisley , Charles H. Winter
DOI:
关键词: Substrate (chemistry) 、 Organic chemistry 、 Thin film 、 Materials science 、 Chemical engineering 、 Transition metal
摘要: A method of forming a thin film on substrate which includes step contacting surface with precursor compound having transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified then contacted an activating compound.
lens.org 参考文章(55)
Christian Dussarrat, Kazutaka Yanagita, Julien Gatineau, Deposition method of ternary films ,(2005)
Suvi P. Haukka, Eva E. Tois, Viljami J. Pore, Tom E. Blomberg, Methods for depositing nickel films and for making nickel silicide and nickel germanide ,(2012)
Angel Sanjurjo, Esperanza Alvarez, Kai-Hung Lau, Gopala N. Krishnan, Eugene Thiers, Don L. Hildenbrand, Methods and apparatuses for producing metallic compositions via reduction of metal halides ,(2004)
Jeffrey Scott Thompson, Atomic layer deposition of copper using surface-activating agents ,(2005)
Sari Johanna Kaipio, Ville Antero Saanila, Kai-Erik Elers, Pekka Juha Soininen, Production of elemental films using a boron-containing reducing agent ,(2004)
Thomas Joseph Knisley, Charles H. Winter, Panditha Koralalage Don Mahesh Chinthaka Karunarathne, Thermally stable volatile film precursors ,(2010)
Michael Svoboda, Heindirk tom Dieck, Carl Krüger, Yi-Hung Tsay, Bis(diazadien)metall(O)-Komplexe, III. Nickel(O)-bis(chelate) mit aliphatischen N-Substituenten/ Bis(diazadien)metal(O) Complexes, III. Nickel(O)-bis(chelates) with Aliphatic N-Substituents Zeitschrift für Naturforschung B. ,vol. 36, pp. 814- 822 ,(1981) , 10.1515/ZNB-1981-0708
Brian A. Vaartstra, Methods, complexes, and systems for forming metal-containing films on semiconductor structures ,(2001)
Timothy A. Quick, Eugene P. Marsh, Methods of depositing antimony-comprising phase change material onto a substrate and methods of forming phase change memory circuitry ,(2009)