Crystallization mechanisms in laser irradiated thin amorphous silicon films
作者： L. Mariucci , A. Pecora , G. Fortunato , C. Spinella , C. Bongiorno
DOI: 10.1016/S0040-6090(02)01254-3
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摘要: Structural properties of thin polycrystalline silicon films, crystallized by single shot excimer laser annealing at different laser energy densities, have been investigated. Formation of disk …
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