Mass spectrometry of atmospheric pressure plasmas

摘要: Atmospheric pressure non-equilibrium plasmas (APPs) are effective source of radicals, metastables and a variety ions photons, ranging into the vacuum UV spectral region. A detailed study these species is important to understand tune desired effects during interaction APPs with solid or liquid materials in industrial medical applications. In this contribution, opportunities challenges mass spectrometry for detection neutrals from APPs, fundamental physical phenomena related sampling process their impact on measured densities fluxes ions, will be discussed. It shown that measurement stable radicals requires proper experimental design reduce beam-to-background ratio, have little beam distortion expansion carefully set electron energy ionizer avoid radical formation through dissociative ionization. The ion composition depends sensitively degree impurities present feed gas as well setting optics used extraction expanding neutral-ion mixture. determination presented method show analyzed originating atmospheric plasma.