Optical Monitoring of Laser-Induced Plasma Derived from Graphite and Characterization of the Deposited Carbon Film
作者： Yasuo Iida , Edward S. Yeung
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摘要: Mechanisms of the deposition carbon thin films by laser ablation graphite were investigated monitoring plasma emission. Parameters such as electron density, ionization temperature, and vibrational temperature during growth evaluated a function power density surrounding atmosphere. Also, Raman spectra deposited measured so that particle size can be estimated from intensity ratio bands around 1360 1580 cm-1, The increase in caused an species but decrease films. existence 10 Torr helium atmosphere drastic changes parameters. with showed low optical band gap, which indicates heat restructuring ablated particles hot plasma. results explained simple model subsequent interaction laser-induced
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