Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering
作者： Daiane Roman , Juliane Bernardi , Cintia L.G. de Amorim , Fernando S. de Souza , Almir Spinelli
DOI: 10.1016/J.MATCHEMPHYS.2011.06.013
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摘要: … As pointed by Oh and Je [33], the surface energy is dominant in the early stage of film growth, in which the (2 0 0) plane has the lowest surface energy and grows faster than other planes…
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researchgate.net 参考文章(34)
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