Wear resistance of ZrC/TiN and ZrC/ZrN thin multilayers grown by pulsed laser deposition

摘要: ZrC/TiN and ZrC/ZrN multilayers thinner than 350 nm were grown on (100) Si substrates at a temperature of 300 °C by the pulsed laser deposition (PLD) technique using KrF excimer (λ=248 nm, pulse duration τ=25 ns, 8.0 J/cm2 fluence 40 Hz repetition rate). Cross-sectional transmission electron microscopy, Auger spectroscopy depth profiling simulations X-ray reflectivity curves indicated that there was intermixing between deposited layers interfaces as well first layer substrate. Nanoindentation investigations found hardness values 35 38 GPa for multilayers. Linear unidirectional sliding wear tests conducted ball-on-plate tribometer under 1 N normal force. Wear tracks produced in Hysitron nanoindenter with 1 μm radius diamond tip 500 μN load. High-resolution cross-sectional microscopy studies showed withstood these without significant damage. The results could be explained use high during resulted very dense strongly adherent nanocrystalline layers.