Process effects on structural properties of TiO2 thin films by reactive sputtering
作者： Dwi Wicaksana , Akihiko Kobayashi , Akira Kinbara
DOI: 10.1116/1.578269
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摘要: … is a high temperature stable phase and has refractive index of … 4, we found that the annealing process made the phase … anatase-rutile transformation was not obtained. The films …
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