Development of humidity standard in trace-moisture region : Characteristics of humidity generation of diffusion tube humidity generator
作者： Hisashi Abe , Hiroshi Kitano
DOI: 10.1016/J.SNA.2005.12.049
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摘要: Abstract The characteristics of humidity generation a diffusion tube generator (DTG) have been studied by the real-time mass measurement evaporating water using magnetic suspension balance and moisture analyzer based on cavity ring-down spectroscopy in amount-of-substance fraction range between 20 nmol/mol 600 nmol/mol. observed mass-change rates cell due to evaporation agree well with calculated basis Fick's law diffusion. stable trace-moisture nitrogen gas is realized precisely controlling temperature pressure. relative standard uncertainty stability DTG 0.006 (0.6%). effect smaller than that frost-point generator.
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