Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip
作者： A. Romani , N. Manaresi , L. Marzocchi , G. Medoro , A. Leonardi
DOI: 10.1109/ISSCC.2004.1332675
关键词:
摘要: Fully-electronic detection of cells and microbeads is achieved on a 320x320 array capacitive sensors in 0.35/spl mu/m 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise /spl les/1.6mV, the resolution 12b ADC.
sci-hub.se 参考文章(6)
Mei Xue, Jiong Li, Zuhong Lu, Chuguang Feng, Zhikuan Zhang, P.K. Ko, Mansun Chan, A high density conduction based micro-DNA-identification array fabricated in a CMOS compatible process international solid-state circuits conference. ,vol. 46, pp. 198- 488 ,(2003) , 10.1109/ISSCC.2003.1234265
S. Gawad, L. Schild, Ph. Renaud, Micromachined impedance spectroscopy flow cytometer for cell analysis and particle sizing Lab on a Chip. ,vol. 1, pp. 76- 82 ,(2001) , 10.1039/B103933B
N. Manaresi, A. Romani, G. Medoro, L. Altomare, A. Leonardi, M. Tartagni, R. Guerrieri, A CMOS chip for individual cell manipulation and detection international solid-state circuits conference. ,vol. 38, pp. 2297- 2305 ,(2003) , 10.1109/JSSC.2003.819171
G. Medoro, N. Manaresi, A. Leonardi, L. Altomare, M. Tartagni, R. Guerrieri, A lab-on-a-chip for cell detection and manipulation IEEE Sensors Journal. ,vol. 3, pp. 317- 325 ,(2003) , 10.1109/JSEN.2003.814648
Björn Eversmann, Martin Jenkner, Franz Hofmann, Christian Paulus, Ralf Brederlow, Birgit Holzapfl, Peter Fromherz, Matthias Merz, Markus Brenner, Matthias Schreiter, Reinhard Gabl, Kurt Plehnert, Michael Steinhauser, Gerald Eckstein, Doris Schmitt-Landsiedel, Roland Thewes, A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity international solid-state circuits conference. pp. 222- 489 ,(2003) , 10.1109/ISSCC.2003.1234276
B. Eversmann, M. Jenkner, F. Hofmann, C. Paulus, R. Brederlow, B. Holzapfl, P. Fromherz, M. Merz, M. Brenner, M. Schreiter, R. Gabl, K. Plehnert, M. Steinhauser, G. Eckstein, D. Schmitt-Landsiedel, R. Thewes, A 128 /spl times/ 128 CMOS bio-sensor array for extracellular recording of neural activity international solid-state circuits conference. ,vol. 38, pp. 2306- 2317 ,(2003) , 10.1109/JSSC.2003.819174