Integration of atomically thin layers of transition metal dichalcogenides into high-Q, monolithic Bragg-cavities - an experimental platform for the enhancement of optical interaction in 2D-materials

摘要: We demonstrate a new approach to integrate single layer MoSe2 and WSe2 flakes into monolithic all-dielectric planar high-quality micro-cavities. These distributed-Bragg-reflector (DBR) cavities may, e.g., be tuned match the exciton resonance of 2D-materials. They are highly robust compatible with cryogenic room-temperature operation. The integration is achieved by customized ion-assisted physical vapor deposition technique, which does not degrade optical properties 2D-resonator shown have high Q-factor in excess 4500. use photoluminescence (PL) experiments that coating procedure SiO2 on prepared surface significantly alter electrooptical Moreover, we observe induced modification PL-spectrum for DBR embedded flake. Our system thus represents versatile platform resonantly enhance tailor light-matter-interaction gentle processing conditions would also allow other sensitive materials these resonant structures.