Applications of the small spot ESCA system SSX 100 in surface analysis

摘要: Evidence is presented that old ESCA limitations and restrictions (e.g. big X-ray beam diameter or small “unrealistic” size of samples) are not valid any longer. The new SSX 100 spectrometer with its unique combination innovations (focusing monochromator, parallel imaging detectors, high throughput electron optics improved sample handling) makes solving surface problems much easier. Two applications on semiconductors insulators using the spot (diameter: 150 μm) demonstrate technique now can be applied which could solved conventional hitherto.