Demonstration of the first 10-kV 4H-SiC Schottky barrier diodes

作者: J.H. Zhao , P. Alexandrov , X. Li

DOI: 10.1109/LED.2003.813370

关键词:

摘要: This letter reports the demonstration of the first 4H-SiC Schottky barrier diode (SBD) blocking over 10 kV based on 115-μm n-type epilayers doped to 5.6× 10/sup 14/cm/sup-3/through the …

参考文章(8)
V. Saxena, A.J. Steckl, High Voltage 4H SiC Rectifiers Using Pt and Ni Metallization Materials Science Forum. pp. 937- 940 ,(1998) , 10.4028/WWW.SCIENTIFIC.NET/MSF.264-268.937
Xue Qing Li, Kiyoshi Tone, Li Hui Cao, Petre Alexandrov, Leonid Fursin, Jian Hui Zhao, Theoretical and Experimental Study of 4H-SiC Junction Edge Termination Materials Science Forum. ,vol. 338, pp. 1375- 1378 ,(2000) , 10.4028/WWW.SCIENTIFIC.NET/MSF.338-342.1375
Rimvydas Mickevičius, Jian H. Zhao, Monte Carlo study of electron transport in SiC Journal of Applied Physics. ,vol. 83, pp. 3161- 3167 ,(1998) , 10.1063/1.367073
R. Singh, J.A. Cooper, M.R. Melloch, T.P. Chow, J.W. Palmour, SiC power Schottky and PiN diodes IEEE Transactions on Electron Devices. ,vol. 49, pp. 665- 672 ,(2002) , 10.1109/16.992877
K.P. Schoen, J.M. Woodall, J.A. Cooper, M.R. Melloch, Design considerations and experimental analysis of high-voltage SiC Schottky barrier rectifiers IEEE Transactions on Electron Devices. ,vol. 45, pp. 1595- 1604 ,(1998) , 10.1109/16.701494
R. Raghunathan, D. Alok, B.J. Baliga, High voltage 4H-SiC Schottky barrier diodes IEEE Electron Device Letters. ,vol. 16, pp. 226- 227 ,(1995) , 10.1109/55.790716
R. Singh, K.G. Irvine, D.C. Capell, J.T. Richmond, D. Berning, A.R. Hefner, J.W. Palmour, Large area, ultra-high voltage 4H-SiC p-i-n rectifiers IEEE Transactions on Electron Devices. ,vol. 49, pp. 2308- 2316 ,(2002) , 10.1109/TED.2002.805576