Multizone illuminator for rapid thermal processing with improved spatial resolution

摘要: A system for rapid thermal processing of a substrate in process chamber while measuring and controlling the temperature at to establish substantially uniform real time. The includes an essentially continuous spirally-configured multizone illuminator having plurality concentric rings heating lamps directing optical power toward fluid cooled reflector facing frontside relatively high reflectivity. can also be offset from geometric center substrate. include contact devices provide conductivity each, or some subset, lamps. illumination present invention provides improved spatial resolution properties