Line-narrowing module for high power laser

摘要: An excimer or molecular fluorine laser includes a gain medium surrounded by resonator and including line-narrowing module preferably prism beam expander one more etalons and/or grating grism within the resonator. The material of transmissive portions prisms plates comprises having an absorption coefficient less than 5×10−3/cm at 248 nm incident radiation, 10×10−3/cm 193 0.1/cm 157 nm. Preferably also has thermal conductivity greater 2.0 W/m° C.