Stage control method and apparatus with varying stage controller parameter
作者： Bausan Yuan
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摘要: An improvement in the performance characteristics of a controller for high precision positioning system, by continuously updating variable parameter transfer function response to, and as monotonically decreasing of, measured position error signal, with small cutoff. The convergence, noise, stability are improved over that constant-parameter controller. can also be tailored to prevent saturation amplifier is driven which drives mechanical system whose being controlled.
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