Lithium niobate waveguide structures
作者： Richard C. Booth , Alan Roy Beaumont
DOI:
关键词:
摘要: An improved method of producing a lithium niobate waveguide device is described, and comprises; (i) providing an optical path (12) on substrate (11); (ii) depositing layer dielectric material (13) the substrate; (iii) conducting (14) layer; (iv) defining one or more electrode tracks using suitable mask (15) (v) dry etching auto-registered process to remove unmasked regions medium.
lens.org 参考文章(4)
R.C. Booth, C.J. Heslop, Application of plasma etching techniques to metal-oxide-semiconductor (MOS) processing☆ Thin Solid Films. ,vol. 65, pp. 111- 123 ,(1980) , 10.1016/0040-6090(80)90063-2
R. C. Alferness, R. V. Schmidt, E. H. Turner, Characteristics of Ti-diffused lithium niobate optical directional couplers Applied Optics. ,vol. 18, pp. 4012- 4016 ,(1979) , 10.1364/AO.18.004012
J.P.G. Bristow, A.C.G. Nutt, P.J.R. Laybourn, Novel integrated optical polarisers using surface plasma waves and ion milled grooves in lithium niobate Electronics Letters. ,vol. 20, pp. 1047- 1048 ,(1984) , 10.1049/EL:19840715
Nicholas John Parsons, Martin Phillip Owen, Velocity matching apparatus ,(1985)