Low temperature intrinsic gettering technique
作者： Mindaugas F. Dautartas , Edward P. Martin , Fred A. Stevie , Alain S. Harrus
DOI:
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摘要: Ionic drift in integrated optical devices is reduced by the utilization of a gettering layer interposed between surface dielectric and electrodes. The material used to form this capable mobile ions at relatively low temperature (for example <600° C.).
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