Integrated circuit fabrication
作者： Larry Bruce Fritzinger , Taeho Kook , Kuo-Hua Lee
DOI:
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摘要: An improved method of capacitor formation is disclosed. A dielectric etched with a etch recipe which creates grooves within an opening. The opening filled metal conforms to the grooves, thereby creating capacitor's lower plate increased surface area. later surrounded and metal, forms respectively upper plate.
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